Semiconductor > FAB > PECVD > Plasmatherm SLR-730

ItemPlasmatherm SLR-730
Asset No
CategoryPECVD
Date
Serial Number
Vintage
Wafer Size6
ConfigurationGas Configuration, MFC’s: Channel One – 0-200 Sccm C4F8 Channel Two – 200 Sccm SF6 Channel Three – 100 Sccm CHF3 Channel Four - 100 Sccm O2 Channel Five - 100 Sccm Argon Channels Six - Eight - B
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